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CAD/CAM for MEMS and BioMEMS

Author(s):
Hargrave, B. ( nScrypt, LLC (USA) )
Irwin, B. ( nScrypt, LLC (USA) )
Parkhill, R. ( nScrypt, LLC (USA) )
Church, K.H. ( nScrypt, LLC (USA) )
Nguyen, M.N. ( BioAssembly, LLC (USA) )
Kachurin, A. ( BioAssembly, LLC (USA) )
Warren, W.L. ( BioAssembly, LLC (USA) )
2 more
Publication title:
Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5389
Pub. Year:
2004
Page(from):
114
Page(to):
125
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453068 [0819453064]
Language:
English
Call no.:
P63600/5389
Type:
Conference Proceedings

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