Piezoelectric ceramic thick films deposited on silicon substrates by screen printing

Piezoelectric ceramic thick films deposited on silicon substrates by screen printing

Author(s):

Yao, K. ( Institute of Materials Research and Engineering (Singapore) )
He, X. ( Institute of Materials Research and Engineering (Singapore) )
Xu, Y. ( Institute of Materials Research and Engineering (Singapore) )
Chen, M. ( Institute of Materials Research and Engineering (Singapore) )

Publication title:

Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5389

Pub. Year:

2004

Page(from):

108

Page(to):

113

Pages:

6

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453068 [0819453064]

Language:

English

Call no.:

P63600/5389

Type:

Conference Proceedings

Details

TDL ID:	ZA00013741
Series ID:	PA00000029
Conf. info. (Name):	Smart Structures and Materials
Conf. info. (Number):	2004
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2004.03.15-2004.03.18

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