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Taking the X Architecture to the 65-nm technology node

Author(s):
Sarma, R.C. ( Cadence Design Systems, Inc. (USA) )
Smayling, M.C. ( Applied Materials, Inc. (USA) )
Arora, N. ( Cadence Design Systems, Inc. (USA) )
Nagata, T. ( Applied Materials, Inc. (USA) )
Duane, M.P. ( Applied Materials, Inc. (USA) )
Shah, S. ( Cadence Design Systems, Inc. (USA) )
Keston, H.J. ( Applied Materials, Inc. (USA) )
Oemardani, S. ( Applied Materials, Inc. (USA) )
3 more
Publication title:
Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5379
Pub. Year:
2004
Page(from):
47
Page(to):
54
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452924 [0819452920]
Language:
English
Call no.:
P63600/5379
Type:
Conference Proceedings

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