Blank Cover Image

Minimizing mask complexity for advanced optical lithography

Author(s):
Publication title:
Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5379
Pub. date:
2004
Page(from):
30
Page(to):
38
Pages:
9
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452924 [0819452920]
Language:
English
Call no.:
P63600/5379
Type:
Conference Proceedings

Similar Items:

Fritze, M., Tyrrell, B., Cann, S.G., Carney, C., Blachowicz, B.A., Brzozowy, D., Kocab, T., Bowdoin, S., Rhyins, P.D., …

SPIE-The International Society for Optical Engineering

Fritze,M., Tyrrell,B., Astolfi,D.K., Davis,P., Wheeler,B., Mallen,R., Jarmolowicz,J., Cann,S.G., Chan,D.Y., Rhyins,P.D., …

SPIE-The International Society for Optical Engineering

Fritze, M., Tyrrell, B., Mallen, R.D., Wheeler, B., Rhyins, P.D., Martin, P.M.

SPIE-The International Society for Optical Engineering

Hagiwara,R., Yasaka,A., Takaoka,O., Kozakai,T., Yabe,S., Koyama,Y., Muramatsu,M., Doi,T., Suzuki,K., Okabe,M., Aita,K., …

SPIE-The International Society for Optical Engineering

Tyrrell, B., Fritze, M., Mallen, R.D., Wheeler, B., Rhyins, P.D., Martin, P.M.

SPIE-The International Society for Optical Engineering

Trybula,W.J., Engelstad,R.L.

SPIE-The International Society for Optical Engineering

Fritze, M., Tyrrell, B., Fedynyshyn, T., Rothschild, M., Brooker, P.

SPIE - The International Society of Optical Engineering

10 Conference Proceedings Masking materials for 157-nm lithography

Smith,B.W., Bourov,A., Lassiter,M., Cangemi,M.

SPIE - The International Society for Optical Engineering

Chan,D., Novak,J.W., Fritze,M.

SPIE-The International Society for Optical Engineering

Erdmann, A., Fuehner, T., Schnattinger, T., Tollkuehn, B.

SPIE - The International Society of Optical Engineering

Rhyins,P., Fritze,M., Chan,D., Carney,C., Blachowicz,B.A., Vieira,M., Mack,C.A.

SPIE-The International Society for Optical Engineering

Leibold, B., Butschke, J., Bettin, L., Beyer, D., Irmscher, M., Koepernik, C., Plontke, R., Vix, A., Voehringer, P.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12