Simulation benchmarking for the whole resist process
- Author(s):
- Kim, S.-K. ( Hanyang Univ. (South Korea) )
- Lee, J.-E. ( Hanyang Univ. (South Korea) )
- Park, S.-W. ( Hanyang Univ. (South Korea) )
- Yoo, J.-Y. ( Samsung Electronics Co., Ltd. (South Korea) )
- Oh, H.- ( Hanyang Univ. (South Korea) )
- Publication title:
- Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5378
- Pub. Year:
- 2004
- Page(from):
- 58
- Page(to):
- 64
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452917 [0819452912]
- Language:
- English
- Call no.:
- P63600/5378
- Type:
- Conference Proceedings
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