In-tool process control for advanced patterning based on integrated metrology
- Author(s):
- Mui, D.S.L. ( Applied Materials (USA) )
- Sasano, H. ( Applied Materials (USA) )
- Liu, W. ( Applied Materials (USA) )
- Yamartino, J. ( Applied Materials (USA) )
- Skumanich, A. ( Applied Materials (USA) )
- Publication title:
- Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5378
- Pub. Year:
- 2004
- Page(from):
- 10
- Page(to):
- 17
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452917 [0819452912]
- Language:
- English
- Call no.:
- P63600/5378
- Type:
- Conference Proceedings
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