Blank Cover Image

A simple and accurate resist parameter extraction method for sub-80-nm DRAM patterns

Author(s):
Lee, S. ( Samsung Electronics Co., Ltd. (South Korea) )
Hwang, C. ( Samsung Electronics Co., Ltd. (South Korea) )
Park, D.-W. ( Samsung Electronics Co., Ltd. (South Korea) )
Kim, I.-S. ( Samsung Electronics Co., Ltd. (South Korea) )
Kim, H.-C. ( Samsung Electronics Co., Ltd. (South Korea) )
Woo, S.-G. ( Samsung Electronics Co., Ltd. (South Korea) )
Cho, H.-K. ( Samsung Electronics Co., Ltd. (South Korea) )
Moon, J.-T. ( Samsung Electronics Co., Ltd. (South Korea) )
3 more
Publication title:
Optical Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
Pub. date:
2004
Page(from):
1413
Page(to):
1421
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
Language:
English
Call no.:
P63600/5377.3
Type:
Conference Proceedings

Similar Items:

Shin, J., Kim, I., Hwang, C., Park, D.-W., Woo, S.-G., Cho, H.-K., Han, W.-S., Moon, J.-T.

SPIE - The International Society of Optical Engineering

Yoon, J.-Y., Hata, M., Hah, J.-H., Kim, H.-W., Woo, S.-G., Cho, H.-K., Han, W.-S.

SPIE - The International Society of Optical Engineering

Kim, S.-H., Kim, H.-D., Lee, S.-H., Park, C.-M., Ryoo, M.-H., Yeo, G.-S., Lee, J.-H., Cho, H.-K., Han, W.-S., Moon, …

SPIE - The International Society of Optical Engineering

Kim, J.-, Kim, S.-J., Chin, S.-B., Oh, S.-H., Goo, D.-H., Lee, S.-J., Woo, S.-G., Cho, H.-K., Han, W.-S., Moon, J.-T., …

SPIE - The International Society of Optical Engineering

D. Park, S. Kim, C. Hwang, S. Lee, H. Cho, J. Moon

SPIE - The International Society of Optical Engineering

Hwang, C., Park, D. W., Shin, J. H., Nam, D. S., Lee, S. J, Woo, S. G., Cho, H. K., Moon, J. T.

SPIE - The International Society of Optical Engineering

Lee, J.-H., Chung, D.-H., Cha, D.-C., Kim, H.-S., Park, J.-S., Nam, D.-G., Woo, S.-K., Cho, H.-S., Han, W.-S.

SPIE-The International Society for Optical Engineering

Jung, M.-H., Lee, S.-H., Kim, H.-W., Woo, S.-G., Cho, H.-K., Han, W.-S.

SPIE-The International Society for Optical Engineering

Jung, M.-H., Kim, H.-W., Hong, J., Woo, S.-G., Cho, H.-K., Han, W.-S.

SPIE - The International Society of Optical Engineering

Lee, J.-Y., Shin, J., Kim, H.-W., Woo, S.-G., Cho, H.-K., Han, W.-S., Moon, J.-T.

SPIE - The International Society of Optical Engineering

Lee, J.-H., Chung, D.-H., Kim, H.-C., Nam, D.-S., Woo, S.-G., Cho, H.-K., Han, W.-S.

SPIE-The International Society for Optical Engineering

Hwang, C., Nam, D.-S., Park, J.-H., Woo, S.-G., Cho, H.-K., Han, W.-S.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12