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Cost of ownership reduction for OPC development and production

Author(s):
Yuan, C.-M. ( Motorola (USA) )
Jarvis, B. ( Motorola (USA) )
Lucas, K.D. ( Motorola (USA) )
Boone, R. ( Motorola (USA) )
Tian, R. ( Motorola (USA) )
Reich, A. ( Motorola (USA) )
1 more
Publication title:
Optical Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
Pub. Year:
2004
Page(from):
1121
Page(to):
1129
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
Language:
English
Call no.:
P63600/5377.2
Type:
Conference Proceedings

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