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The study of contact hole MEEF and defect printability

Author(s):
Jeong, C.-Y. ( Hynix Semiconductor Inc. (South Korea) )
Lim, Y.H. ( Hynix Semiconductor Inc. (South Korea) )
Kim, H.I. ( Hynix Semiconductor Inc. (South Korea) )
Park, J.L. ( Hynix Semiconductor Inc. (South Korea) )
Choi, J.S. ( Hynix Semiconductor Inc. (South Korea) )
Lee, J.G. ( Hynix Semiconductor Inc. (South Korea) )
1 more
Publication title:
Optical Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
Pub. Year:
2004
Page(from):
930
Page(to):
938
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
Language:
English
Call no.:
P63600/5377.2
Type:
Conference Proceedings

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