Optical metrology for 193-nm immersion objective characterization
- Author(s):
Aronstein, D. ( Corning Tropel Corp. (USA) ) Bentley, J. ( Corning Tropel Corp. (USA) ) Dewa, P.G. ( Corning Tropel Corp. (USA) ) Dunn, M. ( Corning Tropel Corp. (USA) ) Schreiber, H. ( Corning Tropel Corp. (USA) ) Nguyen, T. ( Corning Tropel Corp. (USA) ) Webb, J.E. ( Corning Tropel Corp. (USA) ) - Publication title:
- Optical Microlithography XVII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5377
- Pub. Year:
- 2004
- Page(from):
- 836
- Page(to):
- 845
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452900 [0819452904]
- Language:
- English
- Call no.:
- P63600/5377.2
- Type:
- Conference Proceedings
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