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Optical metrology for 193-nm immersion objective characterization

Author(s):
Aronstein, D. ( Corning Tropel Corp. (USA) )
Bentley, J. ( Corning Tropel Corp. (USA) )
Dewa, P.G. ( Corning Tropel Corp. (USA) )
Dunn, M. ( Corning Tropel Corp. (USA) )
Schreiber, H. ( Corning Tropel Corp. (USA) )
Nguyen, T. ( Corning Tropel Corp. (USA) )
Webb, J.E. ( Corning Tropel Corp. (USA) )
2 more
Publication title:
Optical Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
Pub. date:
2004
Page(from):
836
Page(to):
845
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
Language:
English
Call no.:
P63600/5377.2
Type:
Conference Proceedings

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