A superfast 3D lithography simulator and its application for ULSI printability analysis
- Author(s):
- Zhu, Z. ( Carnegie Mellon Univ. (USA) )
- Strojwas, A.J. ( Carnegie Mellon Univ. (USA) )
- Publication title:
- Optical Microlithography XVII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5377
- Pub. Year:
- 2004
- Page(from):
- 658
- Page(to):
- 669
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452900 [0819452904]
- Language:
- English
- Call no.:
- P63600/5377.2
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Propagation of EM waves in axial symmetric structures and its implication for 3D rigorous lithography process simulation
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Generalization of the photo process window and its application to OPC test pattern design
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
METROPOLE-3D: a three-dimensional electromagnetic field simulator for EUV masks under oblique illumination
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
4
Conference Proceedings
Three-dimensional modeling of wafer inspection schemes for sub-70-nm lithography
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
11
Conference Proceedings
Comparison of defect detection schemes using rigorous 3D EM field simulations
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Phase defect printability analysis for chromeless phase lithography technology
SPIE-The International Society for Optical Engineering |