Optical path and image performance monitoring of a full-field 157-nm scanner
- Author(s):
Wells, G. ( IMEC (Belgium) ) Hermans, J. ( IMEC (Belgium) ) Watso, R. ( IMEC (Belgium) ) Kang, Y.-S. ( IMEC (Belgium) ) Morton, R. ( Philips Research (Belgium) ) Kocsis, M.K. ( IMEC (Belgium) ) Okoroanyanwu, U. ( IMEC (Belgium) ) De Bisschop, P. ( IMEC (Belgium) ) Stepanenko, N. ( IMEC (Belgium) ) Ronse, K.G. ( IMEC (Belgium) ) - Publication title:
- Optical Microlithography XVII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5377
- Pub. Year:
- 2004
- Page(from):
- 91
- Page(to):
- 98
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452900 [0819452904]
- Language:
- English
- Call no.:
- P63600/5377.1
- Type:
- Conference Proceedings
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