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Optical path and image performance monitoring of a full-field 157-nm scanner

Author(s):
Wells, G. ( IMEC (Belgium) )
Hermans, J. ( IMEC (Belgium) )
Watso, R. ( IMEC (Belgium) )
Kang, Y.-S. ( IMEC (Belgium) )
Morton, R. ( Philips Research (Belgium) )
Kocsis, M.K. ( IMEC (Belgium) )
Okoroanyanwu, U. ( IMEC (Belgium) )
De Bisschop, P. ( IMEC (Belgium) )
Stepanenko, N. ( IMEC (Belgium) )
Ronse, K.G. ( IMEC (Belgium) )
5 more
Publication title:
Optical Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
Pub. date:
2004
Page(from):
91
Page(to):
98
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
Language:
English
Call no.:
P63600/5377.1
Type:
Conference Proceedings

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