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Critical dimension control in 90nm - 65nm node

Author(s):
Terashita, Y. ( Tokyo Electron Kyushu Ltd. (Japan) )
Shizukuishi, M. ( Tokyo Electron Kyushu Ltd. (Japan) )
Shite, H. ( Tokyo Electron Kyushu Ltd. (Japan) )
Kyoda, H. ( Tokyo Electron Kyushu Ltd. (Japan) )
Oshima, K. ( Tokyo Electron Kyushu Ltd. (Japan) )
Yoshihara, K. ( Tokyo Electron Kyushu Ltd. (Japan) )
1 more
Publication title:
Advances in Resist Technology and Processing XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376
Pub. Year:
2004
Page(from):
1264
Page(to):
1273
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452894 [0819452890]
Language:
English
Call no.:
P63600/5376.2
Type:
Conference Proceedings

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