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Influence of writing strategy on CD control for the spatial-light-modulator-based Sigma7300 DUV laser pattern generator

Author(s):
Fosshaug, H. ( Micronic Laser Systems AB (Sweden) )
Askebjer, P. ( Micronic Laser Systems AB (Sweden) )
Karlsson, J. ( Micronic Laser Systems AB (Sweden) )
Bajramovic, A. ( Micronic Laser Systems AB (Sweden) )
Xing, K. ( Micronic Laser Systems AB (Sweden) )
Eklund, R. ( Micronic Laser Systems AB (Sweden) )
Walford, J. ( Micronic Laser Systems AB (Sweden) )
Ekberg, M. ( Micronic Laser Systems AB (Sweden) )
Hogfeldt, P. ( Micronic Laser Systems AB (Sweden) )
ystrym, T. ( Micronic Laser Systems AB (Sweden) )
5 more
Publication title:
Advances in Resist Technology and Processing XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376
Pub. Year:
2004
Page(from):
879
Page(to):
894
Pages:
16
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452894 [0819452890]
Language:
English
Call no.:
P63600/5376.2
Type:
Conference Proceedings

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