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Effect of the rinse solution to avoid 193-nm resist line collapse: a study for modification of resist polymer and process conditions

Author(s):
Masuda, S. ( Clariant (Japan) K.K. (Japan) )
Kobayashi, M. ( Clariant (Japan) K.K. (Japan) )
Kim, W.-K. ( Clariant Corp. (USA) )
Anyadiegwu, C. ( Clariant Corp. (USA) )
Padmanaban, M. ( Clariant Corp. (USA) )
Dammel, R.R. ( Clariant Corp. (USA) )
Tanaka, K. ( Tokyo Electron Kyushu Ltd. (Japan) )
Yamada, Y. ( Tokyo Electron Kyushu Ltd. (Japan) )
3 more
Publication title:
Advances in Resist Technology and Processing XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376
Pub. Year:
2004
Page(from):
819
Page(to):
829
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452894 [0819452890]
Language:
English
Call no.:
P63600/5376.2
Type:
Conference Proceedings

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