Silicon backbone polymers as EUV resists
- Author(s):
Bravo-Vasquez, J.P. ( Cornell Univ. (USA) ) Kwark, Y.-J. ( Cornell Univ. (USA) ) Ober, C.K. ( Cornell Univ. (USA) ) Cao, H.B. ( Intel Corp. (USA) ) Deng, H. ( Intel Corp. (USA) ) Meagley, R.P. ( Intel Corp. (USA) ) - Publication title:
- Advances in Resist Technology and Processing XXI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5376
- Pub. Year:
- 2004
- Page(from):
- 739
- Page(to):
- 745
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452894 [0819452890]
- Language:
- English
- Call no.:
- P63600/5376.2
- Type:
- Conference Proceedings
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