Impact of BARC on SEM shrinkage of ArF resist
- Author(s):
Lee, S.Y. ( Samsung Electronics Co., Ltd. (South Korea) ) Kim, M. ( Samsung Electronics Co., Ltd. (South Korea) ) Yoon, S. ( Samsung Electronics Co., Ltd. (South Korea) ) Kim, K.-M. ( Samsung Electronics Co., Ltd. (South Korea) ) Kim, J.H. ( Samsung Electronics Co., Ltd. (South Korea) ) Kim, H.-W. ( Samsung Electronics Co., Ltd. (South Korea) ) Woo, S.-G. ( Samsung Electronics Co., Ltd. (South Korea) ) Kim, Y.H. ( Samsung Electronics Co., Ltd. (South Korea) ) Chon, S.-M. ( Samsung Electronics Co., Ltd. (South Korea) ) Kishioka, T. ( Nissan Chemical Industries, Ltd. (Japan) ) Sone, Y. ( Nissan Chemical Industries, Ltd. (Japan) ) Nakajima, Y. ( Nissan Chemical Industries, Ltd. (Japan) ) - Publication title:
- Advances in Resist Technology and Processing XXI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5376
- Pub. Year:
- 2004
- Page(from):
- 575
- Page(to):
- 582
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452894 [0819452890]
- Language:
- English
- Call no.:
- P63600/5376.1
- Type:
- Conference Proceedings
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