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Laser sample stage-based image resolution enhancement method for SEMs

Author(s):
  • Vladar, A.E. ( National Institute of Standards and Technology (USA) )
  • Jayewardene, E.C. ( National Institute of Standards and Technology (USA) )
  • Damazo, B.N. ( National Institute of Standards and Technology (USA) )
  • Keery, W.J. ( National Institute of Standards and Technology (USA) )
  • Postek, M.T., Jr. ( National Institute of Standards and Technology (USA) )
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5375
Pub. Year:
2004
Page(from):
1382
Page(to):
1388
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452887 [0819452882]
Language:
English
Call no.:
P63600/5375.2
Type:
Conference Proceedings

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