Qualification of a low-cost high-quality reticle process for 90-nm contact layers
- Author(s):
Strozewski, K.J. ( Motorola (USA) ) Perez, J. ( Motorola (USA) ) Carter, R. ( Motorola (USA) ) Kiefer, R. ( DuPont Photomasks, Inc. (USA) ) Jackson, C. ( DuPont Photomasks, Inc. (USA) ) MacDonald, S. ( DuPont Photomasks, Inc. (USA) ) Kalk, F. ( DuPont Photomasks, Inc. (USA) ) - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5375
- Pub. Year:
- 2004
- Page(from):
- 1191
- Page(to):
- 1198
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452887 [0819452882]
- Language:
- English
- Call no.:
- P63600/5375.2
- Type:
- Conference Proceedings
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