Three-dimensional measurement by tilting and moving objective lens in CD-SEM (II)
- Author(s):
Abe, K. ( TOPCON Corp. (Japan) ) Kimura, K. ( TOPCON Corp. (Japan) ) Tsuruga, Y. ( TOPCON Corp. (Japan) ) Okada, S.- ( TOPCON Corp. (Japan) ) Suzuki, H. ( TOPCON Corp. (Japan) ) Kochi, N. ( TOPCON Corp. (Japan) ) Koike, H. ( TOPCON Corp. (Japan) ) Hamaguchi, A. ( Toshiba Corp. (Japan) ) Yamazaki, Y. ( Toshiba Corp. (Japan) ) - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5375
- Pub. Year:
- 2004
- Page(from):
- 1112
- Page(to):
- 1117
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452887 [0819452882]
- Language:
- English
- Call no.:
- P63600/5375.2
- Type:
- Conference Proceedings
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