Blank Cover Image

Automated defect cross-sectioning with an in-line DualBeam

Author(s):
Blanc-Coquand, S. ( STMicroelectronics (France) )
Hinschberger, B. ( STMicroelectronics (France) )
Rouchouze, E. ( STMicroelectronics (France) )
Sicurani, E. ( CEA-LETI (France) )
Castagna, M. ( FEI Co. (USA) )
Weschler, M. ( FEI Co. (USA) )
Dworkin, L. ( FEI Co. (USA) )
Renard, D. ( FEI Co. (USA) )
Panyasak, A. ( FEI Co. (USA) )
4 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5375
Pub. date:
2004
Page(from):
819
Page(to):
826
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452887 [0819452882]
Language:
English
Call no.:
P63600/5375.2
Type:
Conference Proceedings

Similar Items:

Rouchouze,E., Burlet,D., Dumant,J.-M.

SPIE-The International Society for Optical Engineering

Bicais-Lepinay, N., Andre, F., Brevers, S., Guyader, P., Trouiller, C., Kwakman, L. F. Tz., Pokrant, S., Verkleij, D., …

SPIE - The International Society of Optical Engineering

Ehrman, L.M., Lanterman, A.D.

SPIE - The International Society of Optical Engineering

Liu, S.T., Liu, H., Nelson, D.K., Flanery, M., Hughes, H.L.

Electrochemical Society

Lesko T. K., Norman B. E., Larimer M. R., Crane G. S.

D. Reidel

Mitchell, C.A., Thomas, M.E., Walts, S.C., Duncan, D.D.

SPIE-The International Society for Optical Engineering

Morris, J. C., Pharr, G. M., Callahan, D. L.

Materials Research Society

Hochman,J.M., Gilgenbach,R.M., Jaynes,R.L., Rintamaki,J.I., Lau,Y.Y., Luginsland,J.W., Lash,J.S., Spencer,T.A.

SPIE-The International Society for Optical Engineering

Stock, J.M., Siegmund, O.H.W., Hull, J.S., Kromer, K.E., Jelinsky, S.R., Heetderks, H.D., Lampton, M.L., Mende, S.B.

SPIE

Barbe, M., Bailly, F., Chevallier, J., Silvestre, S., Loridant-Bernard, D., Kurowski, L., Constant, E., Constant, M.

Materials Research Society

Hinschberger, B., Gomber, C., Ithier, L., Couturier, L., Sherman, B., Rothlevi, O., Ben-Porath, A.

SPIE-The International Society for Optical Engineering

12 Conference Proceedings XMM-Newton (cross)-calibration

Kirsch, M. G. F., Altieri, B., Chen, B., Haberl, F., Metcalfe, L., Pollock, A. M. T., Read, A. M., Saxton, R. D., …

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12