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Overlay errors induced by metallic stress: mechanism and solutions

Author(s):
  • Yen, Y. ( Macronix International Co., Ltd. (Taiwan) )
  • Chang, C. ( Macronix International Co., Ltd. (Taiwan) )
  • Lin, F. ( Macronix International Co., Ltd. (Taiwan) )
  • Su, J. ( Macronix International Co., Ltd. (Taiwan) )
  • Yang, T. ( Macronix International Co., Ltd. (Taiwan) )
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5375
Pub. Year:
2004
Page(from):
761
Page(to):
770
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452887 [0819452882]
Language:
English
Call no.:
P63600/5375.2
Type:
Conference Proceedings

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