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Comparison of solutions to the scatterometry inverse problem

Author(s):
  • Raymond, C.J. ( Accent Optical Technologies, Inc. (USA) )
  • Littau, M.E. ( Accent Optical Technologies, Inc. (USA) )
  • Chuprin, A. ( Accent Optical Technologies, Inc. (United Kingdom) )
  • Ward, S. ( Accent Optical Technologies, Inc. (United Kingdom) )
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5375
Pub. Year:
2004
Page(from):
564
Page(to):
575
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452887 [0819452882]
Language:
English
Call no.:
P63600/5375.1
Type:
Conference Proceedings

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