3D features analysis using spectroscopic scatterometry
- Author(s):
- Quintanilha, R. ( STMicroelectronics (France) )
- Thony, P. ( CEA-LETI (France) )
- Henry, D. ( STMicroelectronics (France) )
- Hazart, J. ( CEA-LETI (France) )
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5375
- Pub. Year:
- 2004
- Page(from):
- 456
- Page(to):
- 467
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452887 [0819452882]
- Language:
- English
- Call no.:
- P63600/5375.1
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Influence of the real-life structures in optical metrology using spectroscopic scatterometry analysis [5858-12]
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
A new analysis strategy for CD metrology using rapid photo goniometry method
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
Spectroscopic ellipsometric scatterometry: sources of errors in critical dimension control
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Spectroscopic polarized scatterometry applied to single-line profiling [6152-116]
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Spectroscopic ellipsometry for lithography front-end level CD control: a complete analysis for production integration
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Application of spectroscopic scatterometry method in hole matrices analysis
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Spectroscopic analysis of the Er3 + (4f11) absorption intensities in NaBi(WO4)2
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
12
Conference Proceedings
Spectroscopic ellipsometry-based scatterometry for depth and linewidth measurements of polysilicon-filled deep trenches
SPIE - The International Society of Optical Engineering |