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Alignment mark signal simulation system for the optimum mark feature selection

Author(s):
Sato, T. ( Toshiba Corp. (Japan) )
Endo, A. ( Toshiba Corp. (Japan) )
Higashiki, T. ( Toshiba Corp. (Japan) )
Ishigo, K. ( Toshiba Corp. (Japan) )
Kono, T. ( Toshiba Corp. (Japan) )
Sakamoto, T. ( Toshiba Corp. (Japan) )
Shioyama, Y. ( Toshiba Corp. (Japan) )
Tanaka, S. ( Toshiba Corp. (Japan) )
3 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5375
Pub. Year:
2004
Page(from):
105
Page(to):
113
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452887 [0819452882]
Language:
English
Call no.:
P63600/5375.1
Type:
Conference Proceedings

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