Layout decompression chip for maskless lithography
- Author(s):
Nikolic, B. ( Univ. of California/Berkeley (USA) ) Wild, B. ( Univ. of California/Berkeley (USA) ) Dai, V. ( Univ. of California/Berkeley (USA) ) Shroff, Y.A. ( Univ. of California/Berkeley (USA) ) Warlick, B. ( Univ. of California/Berkeley (USA) ) Zakhor, A. ( Univ. of California/Berkeley (USA) ) Oldham, W.G. ( Univ. of California/Berkeley (USA) ) - Publication title:
- Emerging Lithographic Technologies VIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5374
- Pub. Year:
- 2004
- Page(from):
- 1092
- Page(to):
- 1099
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452870 [0819452874]
- Language:
- English
- Call no.:
- P63600/5374.2
- Type:
- Conference Proceedings
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