Evaluation of contamination deposition on pinholes used in EUV at-wavelength PDI

Evaluation of contamination deposition on pinholes used in EUV at-wavelength PDI

Author(s):

Sugisaki, K. ( Extreme Ultraviolet Lithography System Development Association (Japan) )

Hasegawa, M. ( Extreme Ultraviolet Lithography System Development Association (Japan) )

Kato, S. ( Extreme Ultraviolet Lithography System Development Association (Japan) )

Ouchi, C. ( Extreme Ultraviolet Lithography System Development Association (Japan) )

Saito, J. ( Extreme Ultraviolet Lithography System Development Association (Japan) )

Niibe, M. ( Himeji Institute of Technology (Japan) )

Suzuki, A. ( Extreme Ultraviolet Lithography System Development Association (Japan) )

Murakami, K. ( Extreme Ultraviolet Lithography System Development Association (Japan) )

3 more

Publication title:

Emerging Lithographic Technologies VIII

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5374

Pub. Year:

2004

Page(from):

702

Page(to):

709

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452870 [0819452874]

Language:

English

Call no.:

P63600/5374.2

Type:

Conference Proceedings

Details

TDL ID:	ZA00013722
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Emerging Lithographic Technologies
Conf. info. (Number):	2004 : 8th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2004.02.24-2004.02.26

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