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Advanced low-complexity compression for maskless lithography data

Author(s):
  • Dai, V. ( Univ. of California/Berkeley (USA) )
  • Zakhor, A. ( Univ. of California/Berkeley (USA) )
Publication title:
Emerging Lithographic Technologies VIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5374
Pub. date:
2004
Page(from):
610
Page(to):
618
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452870 [0819452874]
Language:
English
Call no.:
P63600/5374.2
Type:
Conference Proceedings

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