Scribing of GaN wafer for white LED by water-jet-guided laser
- Author(s):
- Nilsson, T. ( Synova SA (Switzerland) )
- Wagner, F. ( Synova SA (Switzerland) )
- Housh, R. ( Synova SA (Switzerland) )
- Richerzhagen, B. ( Synova SA (Switzerland) )
- Publication title:
- Light-Emitting Diodes: Research, Manufacturing, and Applications VIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5366
- Pub. Year:
- 2004
- Page(from):
- 200
- Page(to):
- 206
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452740 [0819452742]
- Language:
- English
- Call no.:
- P63600/5366
- Type:
- Conference Proceedings
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