Simulation and fabrication of silicon-oxynitride rib structure arrayed waveguide grating device
- Author(s):
- Liu, W.-J. ( I-Shou Univ. (Taiwan) )
- Lai, Y.-C. ( National Chiao Tung Univ. (Taiwan) )
- Weng, M.-H. ( National Nano Device Lab. (Taiwan) )
- Cheng, C.-M. ( National Chiao Tung Univ. (Taiwan) )
- Lee, P.-H. ( I-Shou Univ. (Taiwan) )
- Publication title:
- Emerging optoelectronic applications : 26-27 January, 2004, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5363
- Pub. Year:
- 2004
- Page(from):
- 164
- Page(to):
- 175
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452719 [0819452718]
- Language:
- English
- Call no.:
- P63600/5363
- Type:
- Conference Proceedings
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