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Silicon-based light emission after ion implantation

Author(s):
  • Kittler, M. ( IHP Microelectronics (Germany) )
  • Arguirov, T. ( Brandenburgische Technische Univ. Cottbus (Germany) )
  • Seifert, W. ( IHP Microelectronics/Brandenburgische Technische Univ. Cottbus Joint Lab. (Germany) )
Publication title:
Optoelectronic Integration on Silicon
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5357
Pub. Year:
2004
Page(from):
164
Page(to):
171
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452658 [0819452653]
Language:
English
Call no.:
P63600/5357
Type:
Conference Proceedings

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