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Integrated micro- and nano-optical biosensor silicon devices CMOS compatible

Author(s):
Lechuga, L.M. ( Ctr. Nacional de Microelectronica (Spain) )
Sepulveda, B. ( Ctr. Nacional de Microelectronica (Spain) )
Sanchez del Rio, J. ( Ctr. Nacional de Microelectronica (Spain) )
Blanco, F. ( IKERLAN Ctr. de Investigaciones Technologicas (Spain) )
Calle, A. ( Ctr. Nacional de Microelectronica (Spain) )
Dominguez, C. ( Ctr. Nacional de Microelectronica (Spain) )
1 more
Publication title:
Optoelectronic Integration on Silicon
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5357
Pub. Year:
2004
Page(from):
96
Page(to):
110
Pages:
15
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452658 [0819452653]
Language:
English
Call no.:
P63600/5357
Type:
Conference Proceedings

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