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Optical MEMS platform for low-cost on-chip integration of planar light circuits and optical switching

Author(s):
German, K.A. ( Xerox Wilson Ctr. Research and Technology (USA) )
Kubby, J. ( Xerox Wilson Ctr. Research and Technology (USA) )
Chen, J. ( Xerox Wilson Ctr. Research and Technology (USA) )
Diehl, J. ( Xerox Wilson Ctr. Research and Technology (USA) )
Feinberg, K. ( Xerox Wilson Ctr. Research and Technology (USA) )
Gulvin, P. ( Xerox Wilson Ctr. Research and Technology (USA) )
Herko, L. ( Xerox Wilson Ctr. Research and Technology (USA) )
Jia, N. ( Xerox Wilson Ctr. Research and Technology (USA) )
Lin, P. ( Xerox Wilson Ctr. Research and Technology (USA) )
Liu, X. ( Xerox Wilson Ctr. Research and Technology (USA) )
Ma, J. ( Xerox Wilson Ctr. Research and Technology (USA) )
Meyers, J. ( Xerox Wilson Ctr. Research and Technology (USA) )
Nystrom, P. ( Xerox Wilson Ctr. Research and Technology (USA) )
Wang, Y.R. ( Xerox Wilson Ctr. Research and Technology (USA) )
9 more
Publication title:
Optoelectronic Integration on Silicon
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5357
Pub. Year:
2004
Page(from):
87
Page(to):
95
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452658 [0819452653]
Language:
English
Call no.:
P63600/5357
Type:
Conference Proceedings

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