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Small devices in SOI: fabrication and design issues

Author(s):
Reed, G.T. ( Univ. of Surrey (United Kingdom) )
Masanovic, G.Z. ( Univ. of Surrey (United Kingdom) )
Headley, W.R. ( Univ. of Surrey (United Kingdom) )
Png, C.E. ( Univ. of Surrey (United Kingdom) )
Chan, S.P. ( Univ. of Surrey (United Kingdom) )
Lim, S.T. ( Univ. of Surrey (United Kingdom) )
Passaro, V.M.N. ( Politecnico di Bari (Italy) )
Hak, D. ( Intel Corp. (Israel) )
Cohen, O. ( Intel Corp. (Israel) )
Paniccia, M.J. ( Intel Corp. (USA) )
5 more
Publication title:
Optoelectronic Integration on Silicon
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5357
Pub. Year:
2004
Page(from):
75
Page(to):
86
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452658 [0819452653]
Language:
English
Call no.:
P63600/5357
Type:
Conference Proceedings

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