Novel planarization and passivation in the integration of III-V semiconductor devices

Novel planarization and passivation in the integration of III-V semiconductor devices

Author(s):

Zheng, J.-F. ( Intel Corp. (USA) )

Hanberg, J. ( GigaA ApS, an Intel Corp. (Denmark) )

Demir, H.V. ( Stanford Univ. (USA) )

Sabnis, V.A. ( Stanford Univ. (USA) )

Fidaner, O. ( Stanford Univ. (USA) )

Harris, J.S. Jr. ( Stanford Univ. (USA) )

Miller, D.A.B. ( Stanford Univ. (USA) )

2 more

Publication title:

Optoelectronic Integrated Circuits VI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5356

Pub. Year:

2004

Page(from):

81

Page(to):

91

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452641 [0819452645]

Language:

English

Call no.:

P63600/5356

Type:

Conference Proceedings

Details

TDL ID:	ZA00013700
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Optoelectronic Materials and Devices : Optoelectronic Integrated Circuits
Conf. info. (Number):	2004 : 6th
Conf. info. (Venue):	San Jose, CA USA
Conf. info. (Date):	2004.01.26

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