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Fabrication of micro-optical components in polymer using proton beam writing

Author(s):
  • Bettiol, A.A. ( National Univ. of Singapore (Singapore) )
  • Ansari, K. ( National Univ. of Singapore (Singapore) )
  • Sum, T.C. ( National Univ. of Singapore (Singapore) )
  • van Kan, J.A. ( National Univ. of Singapore (Singapore) )
  • Watt, F. ( National Univ. of Singapore (Singapore) )
Publication title:
Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5347
Pub. Year:
2004
Page(from):
255
Page(to):
263
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452559 [0819452556]
Language:
English
Call no.:
P63600/5347
Type:
Conference Proceedings

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