Monolithic integration of optical waveguides and MEMS-based switching in silicon-on-insulator

Monolithic integration of optical waveguides and MEMS-based switching in silicon-on-insulator

Author(s):

Stuart, H.R. ( Lucent Technologies/Bell Labs. (USA) )
Baumann, F.H. ( Lucent Technologies/Bell Labs. (USA) )
Wong-Foy, A. ( Lucent Technologies/Bell Labs. (USA) )

Publication title:

Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5347

Pub. Year:

2004

Page(from):

137

Page(to):

144

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452559 [0819452556]

Language:

English

Call no.:

P63600/5347

Type:

Conference Proceedings

Details

TDL ID:	ZA00013691
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining Technology for Micro-Optics and Nano-Optics
Conf. info. (Number):	2004 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2004.01.27-2004.01.29

Similar Items:

1 Conference Proceedings Monolithic Integration of a Semiconductor Laser with an Optical Dielectric Waveguide Hamelin, R., Grimbert, B., Jin, G.H., Jabran, A., Vilcot, J.P., Decoster, D., Cargemel, V., Groussin, B., Carriere, C. Electrochemical Society	7 Conference Proceedings Polarization-controllable and monolithically integrable optical waveguide devices Zhou,W., Pamulapati,J., Shen,H. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Digital optical switch based on amorphous silicon waveguide Sirleto, L., Iodice, M., Della Corte, F.G., Rendina, I. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators Smith,J.H., Carson,R.F., Sullivan,C.T., McClellan,G. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Digital optical switch based on amorphous silicon waveguide Sirleto, L., Iodice, M., Della Corte, F.G., Rendina, I. SPIE - The International Society of Optical Engineering	9 Conference Proceedings Silicon-on-insulator micromechanical optical switch with postprocessed polymeric waveguides Bakke,T., Tigges,C.P., Sullivan,C.T. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Optical switch based on polymer waveguides J. Nowosielski, H. Suyal, A. McCarthy, W. Grabowski, R. Kasztelanic, R. Buczynski, M. Taghizadeh SPIE - The International Society of Optical Engineering	10 Conference Proceedings Sharply bent optical waveguide silicon-on-insulator substrate Sakai,A., Go,H., Baba,T. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Monolithic integration of refractive lenses with vertical-cavity lasers and detectors for optical interconnections Strzelecka,E.M., Thompson,G.B., Robinson,G.D., Peters,M.G., Thibeault,B.J., Mondry,M., Jayaraman,V., Peters,F.H., … SPIE-The International Society for Optical Engineering	11 Conference Proceedings A monolithically integrated HgCdTe SWIR photodetector and tunable MEMS-based optical filter Antoszewski, J., Winchester, K. J., Keating, A. J., Nguyen, T., Silva, K. K. M. B. D., Huang, H., Musca, C. A., Deli, J. … SPIE - The International Society of Optical Engineering
6 Conference Proceedings Optical soliton in silicon-on-insulator waveguides J. Zhang, Q. Lin, G. Piredda, R. W. Boyd, G. P. Agrawal Society of Photo-optical Instrumentation Engineers	12 Conference Proceedings Novel monolithic waveguide-based smart pixel for high-contrast,high-gain,and high-speed optical switching Knupfer,B., Kiesel,P., Kneissl,M., Muller,N., Hilburger,U., Dankowski,S.U., Forster,A., Dohler,G.H. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12