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MEMS-based lithography for the fabrication of micro-optical components

Author(s):
Publication title:
Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5347
Pub. Year:
2004
Page(from):
79
Page(to):
84
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452559 [0819452556]
Language:
English
Call no.:
P63600/5347
Type:
Conference Proceedings

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