Design of continuous full-complex modulation proximity printing masks using a quadratic phase distribution
- Author(s):
- Neto, L.G. ( Univ. de Sao Paulo (Brazil) )
- Cirino, G.A. ( EletroPPAr Industria Eletronica Ltda (Brazil) )
- Mansano, R.D. ( Univ. de Sao Paulo (Brazil) )
- Verdonck, P. ( Univ. de Sao Paulo (Brazil) )
- Seabra, A.C. ( Univ. de Sao Paulo (Brazil) )
- Publication title:
- Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5347
- Pub. Year:
- 2004
- Page(from):
- 71
- Page(to):
- 78
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452559 [0819452556]
- Language:
- English
- Call no.:
- P63600/5347
- Type:
- Conference Proceedings
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