Electrostatic micromirror fabricated using CMP and anodic bonding

Electrostatic micromirror fabricated using CMP and anodic bonding

Author(s):

Kim, K. ( Korea Electronics Technology Institute (South Korea) )

Choi, W. ( Korea Univ. (South Korea) )

Park, K. ( Korea Electronics Technology Institute (South Korea) )

Park, J.-S. ( Korea Electronics Technology Institute (South Korea) )

Park, H.-D. ( Korea Electronics Technology Institute (South Korea) )

Heo, H. ( Korea Univ. (South Korea) )

1 more

Publication title:

MOEMS and Miniaturized Systems IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5346

Pub. Year:

2004

Page(from):

175

Page(to):

183

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452542 [0819452548]

Language:

English

Call no.:

P63600/5346

Type:

Conference Proceedings

Details

TDL ID:	ZA00013690
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS and Miniaturized Systems
Conf. info. (Number):	2004 : 4th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2004.01.27-2004.01.28

Similar Items:

1 Conference Proceedings Passivation and Etching Behaviors of Copper Surface in Copper CMP Slurries Eom, D.-H., Hong, Y.-K., Lee, S.-H., Park, J.-Y., Myung, J.-J., Park, J.-G., Kim, K.-S., Song, H.-S., Park, H.-S., Choi, … Electrochemical Society	7 Conference Proceedings Enhancement in electrical properties of (Ba, Sr)TiO3 films using tailored oxide electrodes Choi, D-K., Park, K-W., Park, J-H., Oh, S-H., Kim, B-S., Lee, J-B. MRS-Materials Research Society
2 Conference Proceedings Fabrication of micromirror supported by electroplated nickel posts Shin,J.-W., Chung,S.-W., Kim,Y.-K., Lee,E.-H., Choi,B.-G., Ahn,S.-J. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Micromirror actuation with electrostatic force and plate bending Han,S., Park,H., Pak,J. SPIE - The International Society for Optical Engineering
3 Conference Proceedings Experimental Analysis of the Process of Anodic Bonding Using an Evaporated Glass Layer Choi, W. B., Ju, B. K., Lee, Y. H., Haskard, M. R., Jeong, S. J., Lee, N. Y., Sung, M. Y., Oh, M. H. MRS - Materials Research Society	9 Conference Proceedings Aberration sensitivity control for the isolation layer in low-k1 DRAM process Cho, B.-H., Yim, D., Park, C.-H., Lee, S.-H., Yang, H.-J., Choi, J.-H., Shin, Y.-C., Kim, C.-D., Choi, J.-S., Kang, … SPIE-The International Society for Optical Engineering
4 Conference Proceedings Pulsed anodization technique for fabricating GaSb-based lasers C.C. Largent, M.J. Grove, P.S. Zory, H.K. Choi, G.W. Turner Society of Photo-optical Instrumentation Engineers	10 Conference Proceedings Modeling and measurement of electrostatic micromirror array fabricated with single-layer polysil icon micromachining technology Min,Y.-H, Kim,Y.-K. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Board-to-board optical interconnection using novel optical plug and slot Cho, I. K., Yoon, K. B, Ahn, S. H., Kim, J. T., Lee, W. J., Shin, K. U., Heo, Y. U., Park, H. H. SPIE - The International Society of Optical Engineering	11 Conference Proceedings Evaluation of Barrier CMP Slurries and Characterization of ULK Material Properties Shifts Due to CMP W. Tseng, D. Kioussis, S.L. Manikonda, H. Kim, J. Choi Electrochemical Society
6 Conference Proceedings Decomposition of VOCs using mesoporous TiO2 in a silent plasma Hong, W. -H., Choi, K. -S., Kim, C. -J., Park, D. -W. Elsevier	12 Conference Proceedings Ultrafine Grained Dual Phase Steels Fabricated by Equal Channel Angular Pressing Shin, D.H., Kim, W.G., Ann, J.Y., Park, K.T., Kim, Y.S. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12