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Electrostatic micromirror fabricated using CMP and anodic bonding

Author(s):
Kim, K. ( Korea Electronics Technology Institute (South Korea) )
Choi, W. ( Korea Univ. (South Korea) )
Park, K. ( Korea Electronics Technology Institute (South Korea) )
Park, J.-S. ( Korea Electronics Technology Institute (South Korea) )
Park, H.-D. ( Korea Electronics Technology Institute (South Korea) )
Heo, H. ( Korea Univ. (South Korea) )
1 more
Publication title:
MOEMS and Miniaturized Systems IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5346
Pub. date:
2004
Page(from):
175
Page(to):
183
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452542 [0819452548]
Language:
English
Call no.:
P63600/5346
Type:
Conference Proceedings

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