Hot embossing: a flexible and successful replication technology for polymer MEMS

Hot embossing: a flexible and successful replication technology for polymer MEMS

Author(s):: Heckele, M. ( Forschungszentrum Karlsruhe (Germany) )
Publication title:: Microfluidics, bioMEMS, and medical microsystems II : 26-27 January 2004, San Jose, California, USA
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 5345
Pub. Year:: 2004
Page(from):: 108
Page(to):: 117
Pages:: 10
Pub. info.:: Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819452535 [081945253X]
Language:: English
Call no.:: P63600/5345
Type:: Conference Proceedings

Details

TDL ID:	ZA00013689
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Microfluidics, bioMEMS, and medical microsystems
Conf. info. (Number):	2004 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2004.01.26-2004.01.27

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