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Simulation and characterization of silicon-based 0.5-MHz ultrasonic nozzles

Author(s):
Song, Y.L. ( Institute for Applied Science and Engineering Research (Taiwan) )
Tsai, S.C. ( Institute for Applied Science and Engineering Research (Taiwan) and California State Univ./Long Beach (USA) )
Chen, W.J. ( Institute for Applied Science and Engineering Research (Taiwan) )
Chou, Y.F. ( National Taiwan Univ. (Taiwan) )
Tseng, T.K. ( Institute for Applied Science and Engineering Research (Taiwan) )
Tsai, C.S. ( Institute of Applied Science and Engineering Research (Taiwan) and Univ. of California/Irvine (USA) )
1 more
Publication title:
MEMS/MOEMS Components and Their Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5344
Pub. Year:
2004
Page(from):
44
Page(to):
50
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452528 [0819452521]
Language:
English
Call no.:
P63600/5344
Type:
Conference Proceedings

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