Novel low coherence metrology for nondestructive characterization of high-aspect-ratio microfabricated and micromachined structures

Novel low coherence metrology for nondestructive characterization of high-aspect-ratio microfabricated and micromachined structures

Author(s):

Walecki, W. ( Frontier Semiconductor Measurements, Inc. (USA) )

Wei, F. ( Frontier Semiconductor Measurements, Inc. (USA) )

Van, P. ( Frontier Semiconductor Measurements, Inc. (USA) )

Lai, K. ( Frontier Semiconductor Measurements, Inc. (USA) )

Lee, T. ( Frontier Semiconductor Measurements, Inc. (USA) )

Lau, S.H. ( Frontier Semiconductor Measurements, Inc. (USA) )

Koo, A. ( Frontier Semiconductor Measurements, Inc. (USA) )

2 more

Publication title:

Reliability, Testing, and Characterization of MEMS/MOEMS III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5343

Pub. Year:

2004

Page(from):

55

Page(to):

62

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452511 [0819452513]

Language:

English

Call no.:

P63600/5343

Type:

Conference Proceedings

Details

TDL ID:	ZA00013687
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, Testing, and Characterization of MEMS/MOEMS
Conf. info. (Number):	2004 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2004.01.26-2004.01.28

Similar Items:

1 Conference Proceedings Low Coherence Interferometric Metrology for Ultra-Thin MEMs Structure Walecki, Wojciech, Wei, Frank, Van, Phuc, Lai, Kevin, Lee, Tim, Soucnkov, Vitali, Lau, S.H., Koo, Ann Materials Research Society	7 Conference Proceedings Novel Noncontact Thickness Metrology for Partially Transparent and Nontransparent Wafers for Backend Semiconductor Manufacturing Walecki, Wojciech J., Souchkov, Vitali, Lai, Kevin, Van, Phuc, Santos, Manuel, Pravdivtsev, Alexander, Lau, S. H., Koo, … Materials Research Society
2 Conference Proceedings Low-coherence interferometric absolute distance gauge for study of MEMS structures Walecki, W.J., Lai, K., Pravdivtsev, A., Souchkov, V., Van, P., Azfar, T., Wong, T., Lau, S.H., Koo, A. SPIE - The International Society of Optical Engineering	8 Conference Proceedings High-speed high-accuracy fiber optic low-coherence interferometry for in situ grinding and etching process monitoring [6293-13] Walecki W. J., Pravdivtsev A., Santos II M., Koo A. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Combined low-coherence interferometry and spectrally resolved reflectometry for nondestructive characterization of small-diameter high-aspect ratio … Walecki, W. J., Azfor, T., Pravdivstev, A., Santos II M, Koo, A. SPIE - The International Society of Optical Engineering	9 Conference Proceedings Laser micromachining and nickel plating of high-aspect-ratio structures in polymer molds Jin,H., Ghantasala,M.K., Hayes,J.P., Jolic,K., Harvey,E.C. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Novel combined low-coherence interferometry spectrally resolved reflectometry compatible with high-resolution Raman spectroscopy for nondestructive … Walecki, W. J., Azfar, T., Pravdivstev, A., SantosII, M., Wong, T., Feng, A., Koo, A. SPIE - The International Society of Optical Engineering	10 Conference Proceedings High-aspect-ratio integrated force arrays Bobbio,S.M., Smith,S.W., Zara,J.M., Goodwin-Johansson,S.H., Gentry,K.L., Hudak,J.A., Kerns,M., Elliott,P.C., Rouse,B.J., … SPIE-The International Society for Optical Engineering
5 Conference Proceedings Synchronized low coherence interferometry for in situ and ex situ metrology for semiconductor manufacturing [5880-18] Walecki, W. J., Pravdivtsev, A., Lai, K., Santos II, M., Koo, A. SPIE - The International Society of Optical Engineering	11 Conference Proceedings SCREAM micromachined high-aspect-ratio low-g microaccelerometer Tay,F.E.H., Logeeswaran,V.J., Liang,Y.C. SPIE - The International Society for Optical Engineering
6 Conference Proceedings Fiber-Optics Low-Coherence Integrated Metrology for In Situ Non-Contact Characterization of Wafer Curvature for Wafers Having Non-Uniform Substrate and Thin … Walecki, Wojciech J., Pravdivtsev, Alexander, Lai, Kevin, Santos II, Manuel, Mikhaylov, Georgy, Mihaylov, Mihail, Koo, … Materials Research Society	12 Technical Paper Occupant Mechanics in Rollover Simulations of High and Low Aspect Ratio Vehicles. Yamaguchi, G.T., Ashby, B., Lai, W., Carhart, M.-R., Richards, D. Society of Automotive Engineers

1

2

3

4

5

6

7

8

9

10

11

12