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Stoichiometric and structural properties of pulsed-laser deposited BaTiO3 thin films on silicon

Author(s):
Publication title:
Photon Processing in Microelectronics and Photonics III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5339
Pub. Year:
2004
Page(from):
398
Page(to):
403
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452474 [0819452475]
Language:
English
Call no.:
P63600/5339
Type:
Conference Proceedings

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