Laser micromachining in microelectronic industry by water-jet-guided laser

Laser micromachining in microelectronic industry by water-jet-guided laser

Author(s):

Sibailly, O. ( Synova SA (Switzerland) )
Wagner, F. ( Synova SA (Switzerland) )
Richerzhagen, B. ( Synova SA (Switzerland) )

Publication title:

Photon Processing in Microelectronics and Photonics III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5339

Pub. Year:

2004

Page(from):

258

Page(to):

264

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452474 [0819452475]

Language:

English

Call no.:

P63600/5339

Type:

Conference Proceedings

Details

TDL ID:	ZA00013683
Series ID:	PA00000029
Conf. info. (Name):	SPIE LASE : Photon processing in microelectronics and photonics
Conf. info. (Number):	2004 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2004.01.26-2004.01.29

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