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Development of over 300-watts average power excimer laser

Author(s):
  • Hirata, K. ( Sumitomo Heavy Industries, Ltd. (Japan) )
  • Kawamura, J. ( Sumitomo Heavy Industries, Ltd. (Japan) )
  • Katou, H. ( Sumitomo Heavy Industries, Ltd. (Japan) )
  • Sajiki, K. ( Sumitomo Heavy Industries, Ltd. (Japan) )
  • Okada, M. ( Sumitomo Heavy Industries, Ltd. (Japan) )
Publication title:
Gas and Chemical Lasers, and Applications III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5334
Pub. Year:
2004
Page(from):
198
Page(to):
204
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452429 [0819452424]
Language:
English
Call no.:
P63600/5334
Type:
Conference Proceedings

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