Development of over 300-watts average power excimer laser
- Author(s):
- Hirata, K. ( Sumitomo Heavy Industries, Ltd. (Japan) )
- Kawamura, J. ( Sumitomo Heavy Industries, Ltd. (Japan) )
- Katou, H. ( Sumitomo Heavy Industries, Ltd. (Japan) )
- Sajiki, K. ( Sumitomo Heavy Industries, Ltd. (Japan) )
- Okada, M. ( Sumitomo Heavy Industries, Ltd. (Japan) )
- Publication title:
- Gas and Chemical Lasers, and Applications III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5334
- Pub. Year:
- 2004
- Page(from):
- 198
- Page(to):
- 204
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452429 [0819452424]
- Language:
- English
- Call no.:
- P63600/5334
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
High-average-power picosecond-pulse excimer laser system for x-ray generation
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Interaction of SiO2 glasses with high energy ion beams and vacuum UV excimer laser pulses
Kluwer Academic Publishers |
11
Conference Proceedings
Improvement of luminescent properties of thin-film phosphors by excimer laser processing
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
12
Conference Proceedings
Micromachining of a three-dimensional submillimeter structure using an ultraviolet high-power laser and a five-axis stage
SPIE - The International Society for Optical Engineering |