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Bulk micromachined optical Fabry-Perot modulator

Author(s):
Publication title:
Photonics: Design, Technology, and Packaging
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5277
Pub. Year:
2004
Page(from):
117
Page(to):
128
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451705 [0819451703]
Language:
English
Call no.:
P63600/5277
Type:
Conference Proceedings

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