High-aspect-ratio etching and characterization of 2D photonic crystals in InP/InGaAsP/InP heterostructures
- Author(s):
Anand, S. ( Royal Institute of Technology (Sweden) ) Qiu, M. ( Royal Institute of Technology (Sweden) ) Mulot, M. ( Royal Institute of Technology (Sweden) ) Swillo, M. ( Royal Institute of Technology (Sweden) ) Jaskorzynska, B. ( Royal Institute of Technology (Sweden) ) Karlsson, A. ( Royal Institute of Technology (Sweden) ) - Publication title:
- Photonics: Design, Technology, and Packaging
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5277
- Pub. Year:
- 2004
- Page(from):
- 78
- Page(to):
- 89
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451705 [0819451703]
- Language:
- English
- Call no.:
- P63600/5277
- Type:
- Conference Proceedings
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