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Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror

Author(s):
  • Kobayashi, T. ( National Institute of Advanced Industrial Science (Japan) )
  • Tsaur, J. ( National Institute of Advanced Industrial Science (Japan) )
  • Ichiki, M. ( National Institute of Advanced Industrial Science (Japan) )
  • Maeda, R. ( National Institute of Advanced Industrial Science (Japan) )
Publication title:
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5276
Pub. Year:
2004
Page(from):
524
Page(to):
531
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451699 [081945169X]
Language:
English
Call no.:
P63600/5276
Type:
Conference Proceedings

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